on 27 Mar 2006
Last Applicant/ Owned by
xlith GmbH
Lichtensteinstr. 12
Ulm, , 89075
Serial Number
UK00904980546 filed on 27th Mar 2006
Registration Number
UK00904980546 registered on
22nd May 2008
Correspondent Address
c/o Maguire Boss, Patent & Trade Mark Attorneys, 24 East Street
ST. IVES,
Cambridgeshire,
PE27 5PD
Software for electron beam printing and process technology, in particular for simulating and optimising high-resolution electron beam printing and nanometer process technologies; master substrates for high-resolution and ultra high-resolution replication technology; reference standards for nanometrology; high-resolution masks and reticles.
Services in the field of electron beam printing, namely custom exposure onto solid body substrates, including Si (silicon), GaAs (gallium arsenide), InP (indium phosphide), SiC (silicon carbide), GaN (gallium nitride) and diamond; services in the field of process technology, namely the production of structures in dimensions within the range of 5mm and 250mm.
Services in the field of electron beam printing, namely research, development, consultancy with regard to solid state substrates, including Si (silicon), GaAs (gallium arsenide), InP (indium phosphide), SiC (silicon carbide), GaN (gallium nitride) and diamond; services in the field of process technology, namely research, development, consultancy with regard to structures in dimensions within the range of 5mm and 250mm; creating of, and technical support for, software for electron beam printing and process technology, in particular for simulating and optimising high-resolution electron beam printing and nanometer process technologies.
UK00904980546
Word
Individual