on 05 Dec 1997
Last Applicant/ Owned by
STEAG MicroTech GmbH
Carl-Benz-Strasse 10, 72124 Pliezhausen, Germany
, ,
Serial Number
UK00002152903 filed on 05th Dec 1997
Registration Number
UK00002152903 registered on
18th Sep 1998
Correspondent Address
Sherwood House,, 5 Bluecoats Avenue
Hertford,
Hertfordshire,
SG14 1PB
Machines, machine tools, apparatus, installations and plant, all for use in the manufacture, processing and treatment of semiconductor substrates, silicon slices, wafers, liquid crystal display substrates, liquid crystal display devices, semiconductor chips, solar cells and electronic and opto-electronic articles; apparatus, equipment, installations and plant, all for drying/dry treatment, wet treatment, cleaning and etching of silicon slices, wafers and semiconductor chips; apparatus, equipment, installations and plant, all for carrying out oxidation treatments, treatments with ozonised water and with acids, and particle cleaning in cleaning baths; drying machines and apparatus, using nitrogen, alcohol vapours and mixtures thereof; parts and fittings for all the aforesaid goods.
Apparatus for drying/dry treatment and wet treatment of semiconductor substrates, silicon slices, wafers, liquid crystal display substrates, liquid crystal display devices, semiconductor chips, solar cells and electronic and opto-electronic articles, including the surfaces thereof; apparatus for drying, moistening and wetting; parts and fittings for all the aforesaid goods.
Installation, maintenance, repair and servicing of machines, machine tools, apparatus equipment and plant used in manufacture, processing, treatment, drying, wetting, cleaning and etching of semiconductor substrates, silicon slices, liquid crystal display devices, solar cells and electronic and opto-electronic articles, including the surfaces thereof and parts thereof and therefor.
UK00002152903
Word
Individual