| SMARTPOWER MKS Instruments, Inc.
75694325 30 Apr 1999 | on 02 Jun 2023
| electrical power supplies, namely, microwave apparatus that matches lo... Class 009 Class 009 Computer & Software Products & Electrical & Scientific Products SMART POWER | | | MINI-CONVECTRON MKS INSTRUMENTS, INC.
76420707 12 Jun 2002 | on 14 Jan 2023
| Vacuum Gauges, namely Gauge Tubes and Vacuum Gauge Controllers used in... Class 009 Class 009 Computer & Software Products & Electrical & Scientific Products Vacuum Gauges, namely Gauge Tubes and Vacuum Gauge Controllers used in the measurement of Vacuums | | | MKS MKS Instruments, Inc.
76260293 21 May 2001 | on 09 Dec 2022
| Sensors and electrical instrumentation and power supplies and signal c... Class 009 Class 009 Computer & Software Products & Electrical & Scientific Products Sensors and electrical instrumentation and power supplies and signal conditioners and analog and digital meters for measurement and control of fluid pressure, vacuum and flow; Residual gas analyzers; Process and optical monitors for detecting gas compositions within a process chamber; Quadrapole mass spectrometers; Electrical analog-digital interface adapters, gateway and card modules; Radio frequency, direct current and microwave power supplies and generators; Power generators for converting energy from chemical gas reactions to power for running processes with a process chamber; Thermal, electrical and pressure-based mass flow controllers; Gas pressure valves for controlling and shutting off gas flow; Vacuum and gas component heaters; Gas sticks composed of mass flow controllers, pressure transducers, control valves, isolation valves and volumes; [Gas filters and purifiers;] Heaters; Helium leak detectors; Gas detector and analyzer for monitoring gas emissions for safety and compliance; Calibration equipment for pressure and flow transducers, and for flow meters; Vacuum gauge systems, vacuum gauges, transducers, metal pipe and hose fittings, pressure valves, heater jackets and traps for capturing waste materials exiting from a process chamber; Liquid delivery system composed primarily of a pump, vaporizer, and power controller for vaporizing a liquid into a gas and delivering the gas to a process chamber; In situ flow verifier of process or purge gases; Vacuum sensing and switching equipment, namely, vacuum sensor switches; [Hardware and software for measuring the transmissivity, reflectivity, optical density and thickness of thin metal films, and for providing topographical images of the same;] Software for operating optical spectrometers; Software for operating quadrapole mass spectrometers; Software for determining the presence and measurement of residual contaminants in a semiconductor process; Electronic control accessories, namely, micro-processor based data communication devices for communicating between quadrapole mass analyzers and a computer | | | VQM MKS INSTRUMENTS, INC.
85508144 04 Jan 2012 | on 08 Sep 2022
| Vacuum quality monitors in the nature of electronic vacuum gauge contr... Class 009 Class 009 Computer & Software Products & Electrical & Scientific Products Vacuum quality monitors in the nature of electronic vacuum gauge controllers for use in the measurement of vacuums; scientific apparatus, namely, mass spectrometer and parts and fittings therefor, and optical spectrometers and parts and fittings therefor; other spectrometer-based instruments and subassemblies in the nature of scientific research equipment for use in mass spectrometers; Computer hardware for atmospheric sampling, plasma monitoring and control, particle measuring for gas compositional analysis, all for use in communication units for monitoring, communicating and analyzing data taken from electronic systems involved in controlling and monitoring manufacturing processes and integrating controls and gauges | | | CLEANLINE MKS Instruments, Inc.
90026379 29 Jun 2020 | on 09 Aug 2022
| Plasma generator for etching byproduct from vacuum piping, components,... Class 007 Class 007 Machinery Products CLEAN LINE | | | BARATRON MKS Instruments, Inc.
73319899 20 Jul 1981 | on 01 Jun 2022
| Capacitance Manometers for Measuring for Vacuum Pressure Class 009 Class 009 Computer & Software Products & Electrical & Scientific Products Capacitance Manometers for Measuring for Vacuum Pressure | | | GRANVILLE-PHILLIPS MKS INSTRUMENTS, INC.
76121929 05 Sep 2000 | on 04 Mar 2022
| Vacuum Gauges, Vacuum Gauge Tubes, Vacuum Gauge Controllers, Ionizatio... Class 006 Vacuum Gauges, Vacuum Gauge Tubes, Vacuum Gauge Controllers, Ionization Gauge Tubes, Ionization Gauge Controllers, and Automatic Vacuum Valves for pressure-flow control Class 009 Class 009 Computer & Software Products & Electrical & Scientific Products [ manually operated metal vacuum valves ] | | | OPTIMA MKS INSTRUMENTS, INC.
75942803 13 Mar 2000 | on 23 Feb 2022
| High power electric power supply for thin film processes Class 009 Class 009 Computer & Software Products & Electrical & Scientific Products High power electric power supply for thin film processes | | | VACUUM SENTRY MKS INSTRUMENTS, INC.
73776533 24 Jan 1989 | on 27 Jul 2021
| AUTOMATICALLY OPERATED SECURITY VALVES FOR INDUSTRIAL VACUUM SYSTEMS Class 009 Class 009 Computer & Software Products & Electrical & Scientific Products "VACUUM" | | | NOVA MKS INSTRUMENTS, INC.
76106380 08 Aug 2000 | on 02 Jul 2021
| Radio frequency generators for use in thin film processes Class 009 Class 009 Computer & Software Products & Electrical & Scientific Products Radio frequency generators for use in thin film processes | |