on 22 Nov 2024
Last Applicant/ Owned by
Atlas 3D ApS
Mårkærvej 2B
Taastrup, ,
Serial Number
UK00004128046 filed on 22nd Nov 2024
Registration Number
UK00004128046 registered on
31st Dec 1969
Correspondent Address
Central Formalities Department, Suite 2, The Old Dairy, Elm Farm Business Park, Wymondham, Norwich
Norfolk,
NR18 0SW
Apparatus and instruments for thin film processing, namely, direct atomic layer deposition tools for plasma atomic layer deposition, thermal atomic layer deposition, atomic layer epitaxy, etch tools for atomic layer etching and cluster tools for etching; machines and instruments for thin film processing, namely, atomic layer deposition tools for plasma atomic layer deposition, thermal atomic layer deposition, atomic layer epitaxy, etch tools for atomic layer etching and cluster tools for etching with automated handling; computers and computer programs for atomic scale layer deposition apparatus.
UK00004128046
Word
Individual