on 06 Sep 2005
Last Applicant/ Owned by
MKS Instruments, Inc.
2 Tech Drive, Suite 201
Andover, , 01810
Serial Number
UK00904621215 filed on 06th Sep 2005
Registration Number
UK00904621215 registered on
09th Feb 2007
Correspondent Address
No.1 London Bridge
London,
SE1 9BA
MKS
Classification Information
Class [7]
Machinery Products
Pressure valves; liquid feed systems, consisting mainly of a pump, a vaporiser and a power control mechanism, for vaporising a liquid into a gas, and for delivering the gas to a process chamber; microwave generators.
Class [9]
Computer & Software Products & Electrical & Scientific Products
Sensors and electric instruments and apparatus, power supplies, signal processing apparatus, analog and digital measuring apparatus for measuring and controlling medium flow pressure, vacuum and flow; residual gas analysers; process monitoring apparatus and optical monitoring apparatus for determining gas compositions within a process chamber, quadrupole mass spectrometers; electric analog/digital interface adapters, bridging devices and card modules; radio frequency, direct current and microwave power supplies; thermal electric and pressure-based mass flow control apparatus; gas sticks, consisting of mass flow controls, pressure transducers, control valves, block valves and volumes; helium leak detectors; gas detectors and analysers for monitoring gas emissions for safety purposes and for compliance with regulations; calibration equipment for pressure transducers and flow converters and for flow meters; vacuum measuring systems, vacuum measuring apparatus, transducers; testing apparatus for process gases or circulation gases; vacuum sensing and switching equipment, namely, vacuum sensor switches; hardware and software for measuring the transparency, reflectivity, optical density and thickness of thin metal films, and for providing topographical images thereof; software for operating optical spectrometers; software for operating quadrupole mass spectrometers; software for determining the presence of, and measuring, the residual contaminants in a semiconductor process; electronic control apparatus, namely microprocessor-based data communications devices for communication of data between quadrupole mass analysers and a computer.
Class [11]
Environmental Control Instrument Products (lighting,heating,cooling,cooking)
Electric and electronic power generators for converting energy from chemical gas reactions into power for conducting processes in a process chamber; gas pressure valves for controlling and shutting off gas flows; heating devices for vacuum and gas components; gas filtering and cleaning apparatus; heating devices, electric heating jackets and electrically heatable collecting basins for collecting waste materials from a process chamber.
Mark Details
Serial Number
UK00904621215
Mark Type
Word
Kind of mark
Individual