mks

Class [9]
Computer & Software Products & Electrical & Scientific Products

Sensors and electrical instrumentation and power supplies and signal conditioners and analog and digital meters for measurement and control of fluid pressure, vacuum and flow; process monitors; residual gas analysers; optical monitors; quadrapole mass spectrometers; digital control network products; radio frequency, direct current and microwave power supplies and generators; ozone generators; mass flow controllers; valves; gas filters; pumps; leak detectors; gas detecting and analysis equipment; calibration equipment for pressure and flow transducers, and for flow meters; serial gateways and high density input/output controllers; apparatus components for material processing, namely gauge systems, gauges, transducers; in situ flow verifier for process or purge gases; vacuum sensing and switching equipment, namely, vacuum sensor switches; hardware and software for measuring the transmissivity, reflectivity, optical density and thickness of thin metal films, and for providing topographical images of the same; software for operating optical spectrometers; quadrapole mass spectrometers; software for determining the presence and measurement of residual contaminants in a semiconductor process; electronic control accessories, namely, micro-processor based data communication units for communicating between quadrapole mass analysers and a computer; plasma sources, gas sticks, gas boxes, apparatus components for material processing, namely fittings, flanges, valves, heated lines and traps, reactive gas generators, heaters, purifiers, heaters, equipment for delivering liquid reactant materials to a process reactor, all being parts of scientific, electric, optical and measuring as well as signalling and checking apparatus and instruments for controlling the flow of fluids used in the processing of materials.