Machines for handling semiconductor wafers; robots for handling semiconductor wafers; material handling machines for loading and unloading semiconductor wafers from a pod or manufacturing container and transferring said wafers to a semiconductor manufacturing processing tool; material handling machines for loading and unloading semiconductor wafers to and from pods or manufacturing containers; factory automation machines for loading and unloading wafers, pods or containers [, flat panel displays, magnetic media, and reticles ] during the manufacture of same
Live/Registered
on 23 Feb 2016
SPARTAN
BROOKS AUTOMATION, INC.
78330366 · 19 Nov 2003
15 Dec 2025
007
Class 007
Machinery Products
Computer hardware and related computer software for controlling material handling machines, robots, and factory automation equipment
Machines for handling semiconductor wafers; robots for handling semiconductor wafers; material handling machines for loading and unloading semiconductor wafers from a pod or manufacturing container and transferring said wafers to a semiconductor manufacturing processing tool; material handling machines for loading and unloading semiconductor wafers to and from pods or manufacturing containers; factory automation machines for loading and unloading wafers, pods or containers [, flat panel displays, magnetic media, and reticles ] during the manufacture of same
Computer hardware and related computer software for controlling materi...