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*981

Mark	Details	Status	Class/Description
	981 Tegal Corporation 76201854 30 Jan 2001	Dead/Abandoned on 08 Dec 2005	SEMICONDUCTOR MANUFACTURING MACHINE CONSISTING OF AN ETCHING CHAMBER, ... Class 007 Class 007 Machinery Products SEMICONDUCTOR MANUFACTURING MACHINE CONSISTING OF AN ETCHING CHAMBER, GAS HANDLING UNIT, RF GENERATOR, ELECTRICAL POWER SUPPLY, DIGITAL CONTROLLER, AND CIRCUIT BOARDS AND RELATED COMPUTER SOFTWARE FOR CLEANING, ETCHING AND TREATMENT APPLICATIONS

Mark

Details

Status

Class/Description

981

Tegal Corporation

76201854

30 Jan 2001

Dead/Abandoned

on 08 Dec 2005

SEMICONDUCTOR MANUFACTURING MACHINE CONSISTING OF AN ETCHING CHAMBER, ...

Class 007

Dead/Abandoned

on 08 Dec 2005

981

Tegal Corporation

76201854 · 30 Jan 2001

007

SEMICONDUCTOR MANUFACTURING MACHINE CONSISTING OF AN ETCHING CHAMBER, ...

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Tegal corporation (1)

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Class 7 (1)

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Sheldon r meyer (1)

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Fliesler meyer llp (1)

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