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79273040 23 Aug 2019 | on 06 Aug 2020 | Apparatus and instruments for thin film processing; apparatus and inst... Class 007 Class 007 Machinery Products Apparatus and instruments for thin film processing; apparatus and instruments for thin film processing namely, atomic layer deposition tools, chemical vapour deposition tools, etch tools and cluster tools; apparatus and instruments for thin film processing namely, atomic layer deposition tools, etch tools and cluster tools with automated handling; flexible plasma processing apparatus for plasma etching and plasma deposition | | | TEMPO Oxford Instruments Nanotechnology ToolsLimited trading as Oxford Instruments Plasma Technology
79270735 23 Aug 2019 | on 20 Jul 2020 | Apparatus and instruments for thin film processing namely, robotic ele... Class 007 Class 007 Machinery Products Apparatus and instruments for thin film processing namely, robotic electrical control apparatus and laboratory robots Class 009 Class 009 Computer & Software Products & Electrical & Scientific Products Apparatus and instruments for thin film processing; apparatus and instruments for thin film processing, namely, robotic wafer handlers | |